|
VALVES
[
BAKEABLE RIGHT ANGLE ]
[
ELECTROPNEUMATICALLY RIGHT ANGLE
]
[
HIGH & ULTRA HIGH VACUUM VAVLES
FEATURES ] [
IRIS ]
[
STRAIGHT THROUGH ]
[
VENT & BACK FILL ]
|
| IRIS
VALVES |
The
DVM Iris valve is designed for use in sputter or plasma deposition
and plasma polymerization, where the constant and accurate control
of gas pressure or flow rate is required. Typical applications
cover all constant pressure or gas flow requirements with a
feedback control. The DVM iris valve has been tested in an inert
gas atmosphere for over 200,000 cycles with no apparent wear.
This item normally ships in 4 weeks. |
|
|
Click
here to see conductance graphs
|
- Accurate
and reproducible control of gas flow.
- Near-linear
conductance control from full open to the smallest closed
position.
(See conductance chart)
- Easily
retrofitted to existing vacuum systems.
- Low
profile: all models 1.5" (3.81 mm) thick.
- Coated
stainless steel "Iris" blades for long service
on all models.
- O-ring
or bellows sealed
feedthrough available.
|
|
| TECHNICAL
DATA FOR ASA FLANGE |
| PART NUMBER |
TYPE |
ANSI |
O.D. |
INNER DIA. |
BOLT CIRCLE |
*PRICE $ |
| OPEN |
CLOSED |
| 190501 |
ASA 9 |
4" |
9.00 |
4.500 |
.31 |
7.50 |
2650 |
| 190502 |
ASA 11 |
6" |
11.00 |
6.000 |
.31 |
9.50 |
3,325 |
| 190503 |
ASA 16 |
10" |
16.00 |
10.035 |
.31 |
12.25 |
4,500 |
|
| TECHNICAL
DATA FOR Z-SEAL FLANGE |
| PART NUMBER |
TYPE |
O.D. |
INNER DIA. |
BOLT CIRCLE |
*PRICE $ |
| OPEN |
CLOSED |
| 190504 |
Z600 |
6" |
3.187 |
.31 |
5.129 |
2,550 |
| 190505 |
Z800 |
8" |
4.750 |
.31 |
7.128 |
2,575 |
| 190506 |
Z1000 |
10" |
6.000 |
.31 |
9.128 |
3,225 |
| 190507 |
Z1325 |
13 1/4" |
8.500 |
.31 |
12.06 |
3,575 |
|
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